Isso é abordado em detalhes no artigo do Palpatine de Star Wars Wikia, começar a ler de " Palpatine Renascer "seção.
At an unknown point in time prior to his death at the Battle of Endor Palpatine had found a different way to cheat death by preserving his spirit after the death of his body, by the method of spirit transference. He arranged for a series of clones of himself to be created for his spirit to possess, in the event that he would perish. His primary supply of clones was kept on Byss, guarded by loyal Dark Jedi and immense genetically-altered guards and maintained by a trusted private physician. Unfortunately, the clones were heavily ravaged by the dark side and not sustained by the Force. Each body he took would age and deteriorate more quickly than the last. But the Dark Lord wasn't concerned; he had an endless supply of clones which he could use to rule the Empire.
After the destruction of the second Death Star, Palpatine's spirit was forced to journey in the maddening, bodiless existence of the void, eventually taking possession of the body of Emperor's Hand Jeng Droga. Palpatine called out to Sate Pestage, who rescued the broken body from Kaal and returned it to Byss. Though Droga went mad in the process, he was able to journey to Byss, where Palpatine was able to take possession of a clone of himself. There, on Byss, he would remain for years and would rebuild his strength and Empire. Resurrected, Palpatine planned to replace the Galactic Empire with a "Dark Empire", a universe-spanning magocracy ruled through the dark side of the Force alone, without the need for regional governors or technological domination.
A maior parte é originária de quadrinhos do Dark Empire
No que diz respeito a Vader, a resposta é sim e não. Vader, o Lorde Sith, não. Anakin Skywalker o Jedi fez, de certa forma, desde que ele conseguiu aprender a se comunicar como um Espírito da Força (como evidenciado por ele aparecer com Obi-Wan e Yoda para Luke no final do ROTJ).