Não há evidências que sugiram que ele tenha
Ele possivelmente sente um pouco de remorso por ter matado Mace Windu em Revenge of the Sith , e não dura muito:
Anakin Skywalker knelt in the rain.
He was looking at a hand. The hand had brown skin. The hand held a lightsaber. The hand had a charred oval of tissue where it should have been attached to an arm.
"What have I done?" Was it his voice? It must have been. Because it was his question.
"What have I done?"
Revenge of the Sith Chapter 17: "The Face of the Dark"
Depois deste ponto, quando Anakin cai completamente para o lado negro e é incluído por Darth Vader, não há evidências de que ele sente algum remorso por suas ações. A intenção de George Lucas, que até agora tem sido continuada pelo Lucasfilm Story Group sob Disney, é que Luke é a única coisa que pode realmente penetrar nas Trevas de Vader; isso é algo que Dave Filoni discutiu em uma entrevista de 2016 com a IGN , sobre o tema do confronto de Vader com Ahsoka em Star Wars Rebels (ênfase minha):
We both agreed that the one thing that Ahsoka can't represent in any way is any path of redemption for Vader, or the hope that that's there because Luke is the only one that's going to be able to make that happen. And that's the story that we see. It was our belief that we could have this moment, but it's not even a moment of hesitation for Vader. Because he says then, "You will die," and he means it.